描述
The Gaskleen® 6101 Series Filter Assembly is designed for ≥ 3 nanometer (0.003 μm) filtration of process gases.
- 316L stainless steel electropolished housing
- Emflon® PTFE element
- Available in both standard and shortened version
- Wide variety of fitting options available
- Compact size (2.2 in./56mm dia.) for ease of installation
- 100% integrity tested
- Cleanroom manufactured and packaged
- 100% helium leak tested
Specifications
| Filter Medium | PTFE |
| Core and end caps | Polypropylene |
| O-ring | FEP encapsulated fluoroelastomer |
| internal surface finish | ≤ 25 μin / 0.64 μm Ra |
| Housing | Electropolished 316L stainless steel Housing material meets or exceeds VIM / VAR specifications |
| Removal Rating | ≥ 3 nm |
| Filter Area | < 464 cm2 / 0.5 ft2 |
| Connections | 1⁄4" Gasket Seal, Male (VCR1 or compatible) |
| 1⁄4" Compression Seal (Swagelok1 or compatible) |
|
| 3⁄8" Gasket Seal, Male (VCR or compatible) |
|
| 3⁄8" Compression Seal (Swagelok or compatible) |
|
| 1⁄4" Female pipe thread | |
| Leak Rating | 100% helium leak tested to 10-7 atm•cm3/s |
| Design validated to 10-9 atm•cm3/s | |
| Maximum Operating Pressure | 750 psig @ 176 °F / 52 bar @ 80 °C |
| Maximum forward differential pressure | 100 psid @ 70 °F / 7 bar @ 21 °C |
| Maximum reverse differential pressure | 50 psid @ 70 °F / 3.4 bar @ 21 °C |
| Packaging | Double bagged |
| Outer bag: aluminized mylar | |
| Inner bag: polyethylene | |
| N2 purged | |
1 VCR is a trademarks of Swagelok Co.
Performance
Pressure Drop vs. Gas Flow Rate
Connection Size: .25 in.
Connection Size: .375
Type
Filter Capsules
Application
Process gas filtration
Additional Information
Dimensions
Ordering Information
| Part Number | Description | |
| GLF6101VM4 | Gaskleen, 1⁄4 in. Gasket Seal (VCR or Compatible) Male/Male | 5.56 / 141 |
| GLF6101VM6/8 | Gaskleen, 3⁄8 in. Gasket Seal (VCR or Compatible) Male/Male | 5.81 / 148 |
| GLF6101VFM4 | Gaskleen, 1⁄4 in. Gasket Seal (VCR or Compatible) Female/Male | 5.81 / 148 |
| GLF6101SM4S | Gaskleen, 1⁄4 in. Compression Seal (Swagelok or Compatible) Male/Male | 5.56 / 141 |
| GLF6101SM6S | Gaskleen, 3⁄8 in. Compression Seal (Swagelok or Compatible) Male/Male | 5.81 / 147 |
| GLF6101SM8 | Gaskleen, 1⁄2 in. Compression Seal (Swagelok or Compatible) Male/Male | 4.38 / 111 |
| GLF6101FP4 | Gaskleen 1⁄4 in. Female NPT | 5.19 / 132 |
| SGLF6101VM4M | Short Gaskleen, 1⁄4 in. Gasket Seal (VCR or Compatible) Male/Male | 5.00 / 127 |
| SGLF6101VM4 | Short Gaskleen, 1⁄4 in. Gasket Seal (VCR or Compatible) Male/Male | 4.94 / 126 |
| SGLF6101VM6/8M | Short Gaskleen, 3⁄8 in. Gasket Seal (VCR or Compatible) Male/Male | 5.00 / 127 |
| SGLF6101SM4S | Short Gaskleen, 1⁄4 in. Compression Seal (Swagelok or Compatible) Male/Male | 4.19 / 106 |
| SGLF6101SM6S | Short Gaskleen, 3⁄8 in. Compression Seal (Swagelok or Compatible) Male/Male | 5.00 / 127 |
Unit conversion: 1 bar = 100 kilopascals
Segments
Semiconductor, Display
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