描述
Gas diffusers are ideally suited for vent applications on load lock interfaces or other vacuum chambers where large volumes of gas are flowing in a short amount of time. The Pall ChamberKleen™ 1100 and 5500 Series diffusers combine a stainless steel filter and a unique diffuser membrane that allows flow in 360 degrees. This combination allows large volumes of gas to flow in a uniform manner, limiting the disturbance of particles in the chamber. Consequently, fast vent times can be achieved with little particle disturbance.
- Reduces turbulent gas flow during venting of process chambers
- 360° diffuser design optimizes gas flow
- 316L stainless steel filter medium
- 316L stainless steel diffuser
- Cleanroom manufactured and packaged
Specifications
Materials
- 316L stainless steel filter medium
- 316L stainless steel diffuser
- Viton1 O-ring
- ≤ 22 μin / 0.56 μm Ra internal surface finish
Removal Rating
- ≥ 0.003 μm
- No particle contribution above background; ≤ 1 particle /(ft3 or m3)
Connections
- 1100 Series: NW25 ISO Vacuum Flange
- 5500 Series: NW63 ISO Vacuum Flange
Operating Conditions
- Design Flow Rate2
- 1100 Series: 15 slpm @ 15 psig / 1 bar inlet and outlet to full vacuum (<10 torr)
- 5500 Series: 150 slpm @ 15 psig / 1 bar inlet and outlet to full vacuum (<10 torr)
- Maximum Operating Temperature
- 1100, 5500 Series: 300°F / 149°C (limited by O-ring flange connection)
Recommended Applications
- Vacuum chamber
- Load lock chamber
1 Viton is a registered trademark of DuPont Dow Elastomers
2 Additional designs are available. Please contact Pall Microelectronics for more information.
Performance
Pressure vs. Average Flow Rate
Pressure vs. Chamber Fill Time
Type
Filter Capsules
Application
Process gas filtration, Process gas filtration
Additional Information
Dimensions
Ordering Information
| Part Number | Description | Design Flow Rate3 (slpm) |
| CK1100I25H | 1100 Series, 316L stainless steel filter, Viton1 O-ring | 0-15 |
| CK5500I63H | 5500 Series, 316L stainless steel filter, Viton O-ring | 0-150 |
3 Reference Design Flow Rate on page 182 of catalog.
Unit conversion: 1 bar = 100 kilopascals
Segments
Photovoltaics, Semiconductor
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