描述
Designed for Ultrapure Filtration of Inert Gases
- Gas retention ratings of 3 nm provided by positive mechanical retention
- Patented, highly asymmetric, hydrophobic polysulfone membrane provides high flow rates and low pressure drops
- Non-shedding hydrophobic media rinsed at factory with ultrapure water
- Available in 10.2 cm / 4 in., 25.4 cm / 10 in., 50.8 cm / 20 in., 76.2 cm / 30 in., or 102 cm / 40 in. cartridge lengths (nominal)
- Effective alternative to expensive PTFE filters for Inert gas applications
Applications
Inert gases
Point-of-use filter for air, nitrogen, and other inert gases.Bulk atmospheric gases
Bulk gas filter prior to distribution of inert gases to appropriate areas of the fab site.Semiconductor process equipment
Integral filtration component in semiconductor processing equipment.Specifications
Materials of Construction
| Filter media: | Highly asymmetric polysulfone membrane |
| Hardware: | Polypropylene |
| Support material: | Polypropylene |
| Sealing: | Thermal bond |
| O-rings (SOE): | Silicone (standard) |
| Gaskets (DOE): | Nitrile (standard) |
Dimensions (nominal)
| Outside diameter: | 6.6 cm / 2.6 in. |
| Lengths | 10.2 cm / 4 in., 25.4 cm / 10 in., 50.8 cm / 20 in., 76.2 cm / 30 in., 102 cm / 40 in. |
Performance
Gas flow rate
1700 slpm (1.7 bard inlet, 0.07 bard differential)60 scfm (25 psig inlet, 0.9 psid)
Maximum forward differential pressure
5.5 bard @ 20 °C / 80 psid @ 68 °F1.4 bard @ 95 °C / 20 psid @ 203 °F
Gas retention rating
3 nmCleanliness
Cartridges rinsed at factory with 18 megohm-cm water.Type
Filter Cartridges
Application
Process gas filtration
Additional Information
Pressure Drop vs. Air Flow Rate
Unit conversion: 1 bar = 100 kPa
1 50 psig (3.4 bar) inlet pressure
Ordering Information
VFSH003 [1][2][3] (e.g. VFSH00310M3S)
Table 1 - Cartridge Lengths
| Code | Cartridge Lengths (nominal) |
| 04 | 10.2 cm / 4 in. (M3 only) |
| 10 | 25.4 cm / 10 in. |
| 20 | 50.8 cm / 20 in. |
| 30 | 76.2 cm / 30 in. |
| 40 | 102 cm / 40 in. |
Table 2 - End Configurations
| Code | End Configurations |
| M2 | SOE flat closed end, fits housings with 020 O-ring post |
| M3 | SOE flat closed end, external 222 O-rings |
| M5 | DOE, internal O-rings |
| M6 | SOE flat closed end, external 226 O-rings |
| M7 | SOE fin end, external 226 O-rings |
| M8 | SOE fin end, external 222 O-rings |
| DOE | DOE with elastomer gasket seal and end caps |
Table 3 - Gasket / O-ring Materials
| Code | Gasket / O-ring Materials |
| S | Silicone |
| E | EPDM |
| V | Fluoroelastomer (standard O-rings) |
| N | Nitrile |
| T | FEP encapsulated silicone (O-rings) |
| F | FEP encapsulated fluoroelastomer |
Representative example part numbers
| VFSH00304M3E VFSH00310DOEE300 VFSH00310M3E300 VFSH00310M3S300 VFSH00310M7E300 VFSH00310M7V300 VFSH00320M3S300 VFSH00320M7F300 VFSH00320M7V300 VFSH00320M8S300 VFSH00330M3E300 VFSH00330M8E300 VFSH00330M8S300 | VFSH01010DOEE190 VFSH01010DOEE790 VFSH01010M3E190 VFSH01010M3E790 VFSH01010M3S790 VFSH01010M7S790 VFSH01020DOES790 VFSH01020M3E190 VFSH010975M3E190 | VFSH02004M3E300 VFSH02004M3S300 VFSH02010DOEE300 VFSH02010M3E300 VFSH02010M3S300 VFSH02010M3S300 VFSH02010M3V300 VFSH02010M7E300 VFSH02010M7S300 VFSH02020M3E VFSH02020M3S300 VFSH02020M3V300 VFSH02020M7E300 VFSH02020M7V300 VFSH02020M8E300 VFSH02020M8S300 VFSH02030M7E300 VFSH020-30M8E 300 VFSH02030M8E300 VFSH02040M3E300 VFSH020975M3E300 |
Segments
Photovoltaics
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